Coupling between free space components and slab waveguides is a common requirement for integrated optical devices, and is typically achieved by end-fire or grating coupling. Power splitting and distribution requires additional components. Usually grating couplers are used in combination with MMI/Y-splitters to do this task. In this paper, we present a photonic crystal device which performs both tasks simultaneously and is able to couple light at normal incidence and near normal incidence. Our approach is scalable to large channel counts with little impact on device footprint. We demonstrate in normal incidence coupling with multi-channel splitting for 785 nm light. Photonic crystals are etched into single mode low refractive index SiON film on both SiO2/Si and borosilicate glass substrate. Triangular lattices are shown to provide coupling to 6 beams with equal included angle (60°), while a quasi-crystal lattice with 12-fold rotational symmetry yields coupling to 12 beams with equal included angle (30°). We show how to optimize the lattice constant to achieve efficient phase matching between incident and coupled mode wave vectors, and how to adjust operating wavelength from visible to infrared wavelengths.
展开▼
